Hitachi Mass flow controller
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HITACHI MASS FLOW CONTROLLER

Mass flow controller is one of the most critical devices in the semiconductor manufacturing tools

Hitachi's used its experience in the semiconductor industry to develop high innovative products for the PVD-industry

 

SAM®

SAM brand highperformance mass flow controllers have been carrying forward a tradition. Hitachi uses a waveform diaphragm made of a Ni-Co alloy (YET 101), developed by Hitachi Metals, which also proves that we are a manufacturer of high class metal materials.

 

By employing this excellent diaphragm in the flow rate control valve, the key component in a mass flow controller, we incorporate a simple valve design that does not use any sliding sections and reduces the occurrence of particulate contamination. With a high corrosion resistance and stable control performance, we leave the competition behind and our customers satisfied

MASS FLOW CONTROLLER SFC1480FX / SFC2480FX SERIES

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MASS FLOW CONTROLLER SFC1480G / SFC2480G SERIES

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PRESSURE-BASED PI MASS FLOW CONTROLLER PS100 SERIE

PS100 Mass flow controller
 
 

AERA®

For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes

Low Cost

Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 Series is cost-effective, low noise and low power consumption

Easy Integration

This models feature standard electrical connectors and critical dimensions to easily fit in the existing systems with lower noise and lower power consumption than the case of digital model.

 

Fast Response

Advances in the FC-R7700 Series’ technical design delivery enhanced performance compared to competing mass flow controller (MFC). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FC-R7700 Series provides a flexibility for many applicable needs and produce a settling time of ≤ 2 sec. between set points. (≤ 3sec. for FC-R7720CD/FC-R7720D)

 

Unsurpassed Reliability

The usage of less number of the eletric devices than the case of digital model and no usage of the DC-DC converter results the highly- reliable performance in a long-term.

MASS FLOW CONTROLLERS AERA®
FC-R7700 SERIES

Aera massflow controller

MASS FLOW CONTROLLERS AERA®

FC-R7800 SERIES

Aera massflow controller

DIGITAL MASS FLOW PRODUCTS AERA®

FC-DR980

Digital Aera massflow controller
 

DIGITAL MASS FLOW PRODUCTS AERA® TRANSFORMER®

Aera massflow controller

PRESSURE INSENSITIVE (PI) MASS FLOW CONTROLLER AERA®  HG200SERIES

Aera massflow controller

VAPORIZER AS SERIES

Digital Aera massflow controller

FLOW MANAGEMENT: BETTER TECHNOLOGY FOR BETTER RESULTS

Improvement of the functionality of PVD production equipment in different market segments, like flat panel displays, data storage products, glass coating, solar cells, decorative coating, and other advanced product applications

CUSTOMER BENEFITS

Less tool down time

  • Very reliable product

  • Multigas / Multirange able,

  • programmable by PC on tool

Highest performance

  • ultra-fast response

  • Wide flow control range 

  • high accuracy

  • High valve shut-off performance

  • Self-diagnostic

Available with multi I/O options

  • Analog 0…5V, 4…20mA

  • Digital RS485, Devicenet, EtherCat,

  • With PB adapter also suitable on former Profibus Tools

Service Capabilities

  • On-site service

  • Trouble shooting

  • Repair, recalibration, range change within one week (in case of tool down 24h

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