Vertriebsrechte für:
Deutschland | Österreich | Tschechische Rep. | Polen | Schweiz |
Benelux | Niederlande | Dänemark
HITACHI MASS FLOW CONTROLLER
Mass flow controller is one of the most critical devices in the semiconductor manufacturing tools
Hitachi's used its experience in the semiconductor industry to develop high innovative products for the PVD-industry
SAM®
SAM brand highperformance mass flow controllers have been carrying forward a tradition. Hitachi uses a waveform diaphragm made of a Ni-Co alloy (YET 101), developed by Hitachi Metals, which also proves that we are a manufacturer of high class metal materials.
By employing this excellent diaphragm in the flow rate control valve, the key component in a mass flow controller, we incorporate a simple valve design that does not use any sliding sections and reduces the occurrence of particulate contamination. With a high corrosion resistance and stable control performance, we leave the competition behind and our customers satisfied
AERA®
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 Series is cost-effective, low noise and low power consumption
Easy Integration
This models feature standard electrical connectors and critical dimensions to easily fit in the existing systems with lower noise and lower power consumption than the case of digital model.
Fast Response
Advances in the FC-R7700 Series’ technical design delivery enhanced performance compared to competing mass flow controller (MFC). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FC-R7700 Series provides a flexibility for many applicable needs and produce a settling time of ≤ 2 sec. between set points. (≤ 3sec. for FC-R7720CD/FC-R7720D)
Unsurpassed Reliability
The usage of less number of the eletric devices than the case of digital model and no usage of the DC-DC converter results the highly- reliable performance in a long-term.
FLOW MANAGEMENT: BETTER TECHNOLOGY FOR BETTER RESULTS
Improvement of the functionality of PVD production equipment in different market segments, like flat panel displays, data storage products, glass coating, solar cells, decorative coating, and other advanced product applications
CUSTOMER BENEFITS
Less tool down time
-
Very reliable product
-
Multigas / Multirange able,
-
programmable by PC on tool
Highest performance
-
ultra-fast response
-
Wide flow control range
-
high accuracy
-
High valve shut-off performance
-
Self-diagnostic
Available with multi I/O options
-
Analog 0…5V, 4…20mA
-
Digital RS485, Devicenet, EtherCat,
-
With PB adapter also suitable on former Profibus Tools
Service Capabilities
-
On-site service
-
Trouble shooting
-
Repair, recalibration, range change within one week (in case of tool down 24h